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![PDF] Modeling a MEMS Thermal Conductivity Pressure Sensor for the Evaluation of Glass Frit Vacuum Packaging | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/b5132c91a37ed6113c62b44d5d9ecbba378a7cfd/5-Table1-1.png "PDF] Modeling a MEMS Thermal Conductivity Pressure Sensor for the Evaluation of Glass Frit Vacuum Packaging | Semantic Scholar")
PDF] Modeling a MEMS Thermal Conductivity Pressure Sensor for the Evaluation of Glass Frit Vacuum Packaging | Semantic Scholar
